Plasma/Surface Interaction and Microplasmas


This OR has undergone a quasi-reconversion in recent years, moving from the study of plasma-carbon surface interaction to plasma-metal surface interaction (W, Al), leading to the development of internal collaborations with the laboratory’s metallurgists (MRE code for hydrogen loading of metals).

These activities are essential for the study of the behavior of materials relevant for fusion (tokamak edge plasmas), recognized by the federation of research in magnetic controlled fusion (FR-FCM) and EUROfusion. In particular, the mechanisms of production, transport, and hydrogen (and isotope) loading of metallic dusts (tungsten in particular) remains a subject of interest to the Fusion community, and is being studied by a double approach: experimental (ECR dust generator) and modeling.

The experimental devices dedicated until now to the study of IPS in the context of “on-board plasmas” are also used for exploratory studies of synthesis of materials of interest, such as carbon-metal composites for example. Nanostructured thin films (rather oxides) are also synthesized by sol-gel processes and functionalized by plasma, in order to test their performances for various applications (photovoltaic, …).
Finally, a new important axis of study is being developed within the OR, i.e. the design of atom sources (nitrogen in particular) using :

  • High energy density microwave plasmas (ANR Blanc ASPEN project, EM2C-CentraleSupélec and LPP-Polytechnique collaboration). The OR contributes to improve the understanding of dissociation processes involving excited electronic states of N2 which are source of atomic N, via (i) the use of two microwave discharge devices, i.e. the ECR CASIMIR low pressure reactor for the non-collisional regime, and a microwave discharge based on the use of a micro-strip transmission line operating at atmospheric pressure; and (ii) the development of models first 0-D for a fine description of the kinetics of the excited and ionized states, then 2-D self-coherent, in order to be able to treat in particular the dynamics of the micro-strips discharges The diagnosis of the microwave sources will be ensured by using the fast laser chain (picosecond) financed by the regional equipment contract SESAME DIAGPLAS.


  • A microplasma matrix reactor with hollow cathodes, with the objective in the next 5 years to continue and consolidate the work already undertaken on the development, characterization and modeling of this reactor for the synthesis of advanced materials. Hexagonal boron nitride (h-BN) is particularly targeted. Theoretical and experimental research is underway to understand the fundamental mechanisms that govern the deposition process (in particular the dissociation of molecular N2 into atomic N) and to optimize the reactor. This work is part of the 4-year ANR JCJC DESYNIB project that started in 2016. Two study reactors are developed in parallel, (i) one dedicated to the diagnosis of the plasma discharge, in particular through advanced techniques under development in the laboratory (fast laser spectroscopy ps, via the regional equipment project SESAME DIAGPLAS), and (ii) a second one used for the deposition of h-BN thin films. The work carried out within the framework of this action is done in close collaboration with the actors of the ANR ASPEN project (development of an efficient N atom source) and the OR “Diamant et matériaux carbonés” (expertise on the growth of large gap materials).


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